群创(InnoLux) 模组

群创(InnoLux) 模组 特色

  1. 支援群创需求的多种设备模式，我们提供多载函式可自由选择。
  2. 支援多种回覆模式，可完全满足群创的回覆需求。
  3. 大幅加快工程人员的开发时间。

Stream Functions

Stream Function Name
S1F65 Tool/Chamber Status Change Report
S1F66 Reply Tool/Chamber Status Change
S1F67 Lot Status Change Report
S1F68 Reply Lot Status Change Report
S1F69 Online Summary Status Report
S1F70 Reply Online Summary Status Report
S1F71 Mapping Data Report
S1F72 Reply Mapping Data Report
S1F73 Port Status Change Report
S1F74 Reply Port Status Change
S1F75 Transfer Mode Change Report
S1F76 Reply Transfer Mode Change
S1F77 Load/Unload Port Status Query
S1F78 Load/Unload Port Status Query Reply
S1F81 Mask Load/Unload Report
S1F82 Reply Mask Load/Unload Report
S1F83 Mask List Report
S1F84 Reply Mask List Report
S1F85 Mask List Request
S1F86 Reply Mask List Request
S1F89 Mask Status Change Report
S1F90 Reply Mask Status Change Report
Stream Function Name
S1F95 Glass Remove Report
S1F96 Reply Glass Remove Report
S5F65 Alarm Report
S5F66 Alarm Report Acknowledge
S6F9 Glass Re-location Report
S6F10 Glass Re-location Report Reply
S6F65 Glass Process Data Report
S6F65 Glass Process Data Report Reply
S6F69 Lot Process Data Report
S6F69 Lot Process Data Report Reply
S7F65 Lot Process Data Transfer
S7F65 Lot Process Data Transfer Reply
S7F67 Inquire Last Modification Date/Time of Recipe ID
S7F67 Reply Last Modification Date/Time of Recipe ID
S7F71 Lot Process Command Data Request
S7F72 Reply Lot Process Command Data Request
S7F73 Lot Cancel Report
S7F74 Lot Cancel Report Reply
S7F75 Remote Recipe Parameter Setting
S7F75 Remote Recipe Parameter Setting Reply
S7F77 Recipe Parameter Query
S7F77 Recipe Parameter Query Reply
S7F79 Glass Process Command Data Request
S7F79 Reply Glass Process Command Data Request