XGEM Host 特色
- 符合 .Net 開發精神,程式極度靈活
- 良好的使用者介面,簡單易懂,可快速上手
- 符合國內第一大半導體廠的 GEM 以及 300mm 通訊規格
- 專為 GEM Host 所開發的 Driver,不會有 EQP 與 Host 混用的問題
- Host 的範例程式簡單,並且功能強大,可以清楚展現 GEM 的所有功能
- 可以輕鬆管理不同設備不同的 Recipe Body
- S6F11 事件可以輕鬆結合 S1F3 或是 TraceData,不會有結合困難的問題
- GEM Driver 共分為 14 大模組,與 SECS/GEM Implemented Table 完全相同
- Host/EQP 各分為 14 大模組,由模組去選擇要使用的 Stream Function,更加容易上手
- 通訊的相容性極高,可以高度相容 EQP 發過來的命令格式
- 收到的 Stream Function 可選擇是否回應同意或是拒絕,回應方式極為簡單,不需考慮編解碼的問題
- Driver 內建 SECS 傳送過程的 Log 字串,使用者不需自己解碼
Compatibility
GEM Compliance Statement Fundamental GEM Requirements |
Support |
---|---|
Equipment Processing States | |
Host Initiated S1=F13/F14 Scenario | |
Event Notification | |
On-Line Identification | |
Error Messages | |
Control (Operator Initiated) | |
Establish Communication Additional Capabilities | |
Dynamic Event Report Configuration | |
Variable Data Collection | |
Trace Data Collection |
GEM Compliance Statement Fundamental GEM Requirements |
Support |
---|---|
Status Data Collection | |
Alarm Management | |
Remote Control | |
Equipment Constants | |
Process Program Management | |
Equipment Terminal Services Material Movement | |
Clock | |
Limits Monitoring | |
Spooling | |
Control (Host-Initiated) |
Stream Functions
Stream | Function Name |
---|---|
SXF0 | Abort Transaction |
S1F1 | Are You There Request |
S1F2 | On Line Data |
S1F3 | Establish Communications Request |
S1F4 | Establish Communications Request Acknowledge |
S1F5 | Formatted Status Request (FSR) |
S1F6 | Formatted Status Data (FSD) |
S1F11 | Status Variable Namelist Request |
S1F12 | Status Variable Namelist Reply |
S1F13 | Establish Communications Request |
S1F14 | Establish Communications Request Acknowledge |
S1F15 | Request OFF-LINE |
S1F16 | OFF-LINE Acknowledge |
S1F17 | Request ON-LINE |
S1F18 | ON-LINE Acknowledge |
S2F13 | Equipment Constant Request |
S2F14 | Equipment Constant Data |
S2F15 | New Equipment Constant Send |
S2F16 | New Equipment Constant Acknowledge |
S2F17 | Date And Time Data |
S2F18 | Date And Time Data Acknowledge |
S2F21 | Remote Command Send (RCS) |
S2F22 | Remote Command Acknowledge (RCA) |
S2F23 | Host Initiated Trace Send |
S2F24 | Trace Initiated Acknowledge. |
S2F29 | EC Name List Request |
S2F30 | EC Name List Request Acknowledge |
S2F31 | Date And Time Set Request |
S2F32 | Date And Time Set Acknowledge |
S2F33 | Define Report |
S2F34 | Define Report Acknowledge |
S2F35 | Link Event Report |
S2F36 | Link Event Report Acknowledge |
S2F37 | Enable/Disable Event Report |
S2F38 | Enable/Disable Event Report Acknowledge |
S2F41 | Host Command Send |
S2F42 | Host Command Acknowledge |
S2F43 | Reset Spooling Streams and Functions |
S2F44 | Reset Spooling acknowledge |
S2F45 | Define Variable Limit Attributes (DVLA) |
S2F46 | Variable Limit Attribute Acknowledge (VLAA) |
S2F47 | Variable Limit Attribute Request (VLAR) |
Stream | Function Name |
---|---|
S2F48 | Variable Limit Attributes Send (VLAS) |
S2F49 | Enhanced Remote Command |
S2F50 | Enhanced Remote Command Acknowledge |
S5F1 | Alarm Report Send |
S5F2 | Alarm Report Acknowledge |
S5F3 | Enable/disable Alarm Send |
S5F4 | Enable/disable Alarm Acknowledge |
S5F5 | List Alarms Request |
S5F6 | List Alarm Data |
S5F7 | List Enable Alarm Request |
S5F8 | List Enable Alarm Request Acknowledge |
S6F1 | Trace Data Send |
S6F2 | Trace Data Acknowledge |
S6F11 | Event Report Send |
S6F12 | Event Report Acknowledge |
S6F15 | Event Report Request |
S6F16 | Event Report Data |
S6F19 | Individual Report Request |
S6F20 | Individual Report Data |
S6F23 | Request Spooled Data |
S6F24 | Request Spooled Data Acknowledge Send |
S7F1 | Process Program Load Inquire |
S7F2 | Process Program Load Grant |
S7F3 | Process Program Send |
S7F4 | Process Program Acknowledge |
S7F5 | Process Program Reques |
S7F6 | Process Program Data |
S7F17 | Delete Process Program Send |
S7F18 | Delete Process Program Acknowledge |
S7F19 | Current EPPD Request |
S7F20 | Current EPPD Data |
S7F23 | Formatted Process Program Send |
S7F24 | Formatted Process Program Data |
S7F25 | Formatted Process Program Request |
S7F26 | Formatted Process Program Data |
S10F1 | Terminal Request |
S10F2 | Terminal Request Acknowledge |
S10F3 | Terminal Display, Single (VTN) |
S10F4 | Terminal Display, Single Acknowledge (VTA) |
S10F5 | Terminal Display, Multi-Block (VTN) |
S10F6 | Terminal Display, Multi-Block Acknowledge (VMA) |