Feature of XGEM Equipment 300mm
- With the features of .Net framework. The program is very flexible.
- Easy-to-use interface. Easy to learn and understand quickly.
- Meet the GEM and 300mm communication specifications of major wafer manufacturer in Taiwan.
- All files are combined into a single file (MS Excel). Easy to manage.
- Easily manage Control Job and Process Job
- Easily combine E87 and Loadport.
- Easily reject the command from Host if necessary.
- Each command from Host can be reply automatically or manually.
- GEM Driver is divided into 17 major modules. Exactly the same as SECS/GEM Implemented Table.
- Both Host and Equipment are divided into 17 major modules. Easier to select the Stream Function from modules.
- The communication is very compatible. Highly compatible with the command format sent by Host.
- With built-in Log string for SECS transmission, users don't need to decode anymore.
Compatibility
| GEM Compliance Statement Fundamental GEM Requirements |
Support |
|---|---|
| Equipment Processing States | |
| Host Initiated S1=F13/F14 Scenario | |
| Event Notification | |
| On-Line Identification | |
| Error Messages | |
| Control (Operator Initiated) | |
| Establish Communication Additional Capabilities | |
| Dynamic Event Report Configuration | |
| Variable Data Collection | |
| Trace Data Collection | |
| Status Data Collection | |
| Alarm Management | |
| Remote Control |
| GEM Compliance Statement Fundamental GEM Requirements |
Support |
|---|---|
| Equipment Constants | |
| Process Program Management | |
| Equipment Terminal Services Material Movement | |
| Clock | |
| Limits Monitoring | |
| Spooling | |
| Control (Host-Initiated) |
| 300mm Implemented Table | Support |
|---|---|
| Object Service Standard | |
| Processing Management | |
| Control Job Management | |
| Carrier Management Standard |
Stream Functions
| Stream | Function Name |
|---|---|
| SXF0 | Abort Transaction |
| S1F1 | Are You There Request |
| S1F2 | On Line Data |
| S1F3 | Establish Communications Request |
| S1F4 | Establish Communications Request Acknowledge |
| S1F5 | Formatted Status Request (FSR) |
| S1F6 | Formatted Status Data (FSD) |
| S1F11 | Status Variable Namelist Request |
| S1F12 | Status Variable Namelist Reply |
| S1F13 | Establish Communications Request |
| S1F14 | Establish Communications Request Acknowledge |
| S1F15 | Request OFF-LINE |
| S1F16 | OFF-LINE Acknowledge |
| S1F17 | Request ON-LINE |
| S1F18 | ON-LINE Acknowledge |
| S2F13 | Equipment Constant Request |
| S2F14 | Equipment Constant Data |
| S2F15 | New Equipment Constant Send |
| S2F16 | New Equipment Constant Acknowledge |
| S2F17 | Date And Time Data |
| S2F18 | Date And Time Data Acknowledge |
| S2F21 | Remote Command Send (RCS) |
| S2F22 | Remote Command Acknowledge (RCA) |
| S2F23 | Host Initiated Trace Send |
| S2F24 | Trace Initiated Acknowledge. |
| S2F29 | EC Name List Request |
| S2F30 | EC Name List Request Acknowledge |
| S2F31 | Date And Time Set Request |
| S2F32 | Date And Time Set Acknowledge |
| S2F33 | Define Report |
| S2F34 | Define Report Acknowledge |
| S2F35 | Link Event Report |
| S2F36 | Link Event Report Acknowledge |
| S2F37 | Enable/Disable Event Report |
| S2F38 | Enable/Disable Event Report Acknowledge |
| S2F41 | Host Command Send |
| S2F42 | Host Command Acknowledge |
| S2F43 | Reset Spooling Streams and Functions |
| S2F44 | Reset Spooling acknowledge |
| S2F45 | Define Variable Limit Attributes (DVLA) |
| S2F46 | Variable Limit Attribute Acknowledge (VLAA) |
| S2F47 | Variable Limit Attribute Request (VLAR) |
| S2F48 | Variable Limit Attributes Send (VLAS) |
| S2F49 | Enhanced Remote Command |
| S2F50 | Enhanced Remote Command Acknowledge |
| S5F1 | Alarm Report Send |
| S5F2 | Alarm Report Acknowledge |
| S5F3 | Enable/disable Alarm Send |
| S5F4 | Enable/disable Alarm Acknowledge |
| S5F5 | List Alarms Request |
| S5F6 | List Alarm Data |
| S5F7 | List Enable Alarm Request |
| S5F8 | List Enable Alarm Request Acknowledge |
| Stream | Function Name |
|---|---|
| S6F1 | Trace Data Send |
| S6F2 | Trace Data Acknowledge |
| S6F11 | Event Report Send |
| S6F12 | Event Report Acknowledge |
| S6F15 | Event Report Request |
| S6F16 | Event Report Data |
| S6F19 | Individual Report Request |
| S6F20 | Individual Report Data |
| S6F23 | Request Spooled Data |
| S6F24 | Request Spooled Data Acknowledge Send |
| S7F1 | Process Program Load Inquire |
| S7F2 | Process Program Load Grant |
| S7F3 | Process Program Send |
| S7F4 | Process Program Acknowledge |
| S7F5 | Process Program Reques |
| S7F6 | Process Program Data |
| S7F17 | Delete Process Program Send |
| S7F18 | Delete Process Program Acknowledge |
| S7F19 | Current EPPD Request |
| S7F20 | Current EPPD Data |
| S7F23 | Formatted Process Program Send |
| S7F24 | Formatted Process Program Data |
| S7F25 | Formatted Process Program Request |
| S7F26 | Formatted Process Program Data |
| S10F1 | Terminal Request |
| S10F2 | Terminal Request Acknowledge |
| S10F3 | Terminal Display, Single (VTN) |
| S10F4 | Terminal Display, Single Acknowledge (VTA) |
| S10F5 | Terminal Display, Multi-Block (VTN) |
| S10F6 | Terminal Display, Multi-Block Acknowledge (VMA) |
| S3F17 | Carrier Action Request |
| S3F18 | Carrier Action Acknowledge |
| S3F27 | Change Access Request |
| S3F28 | Change Access Acknowledge |
| S14F9 | Create Object Request (COR) |
| S14F10 | Create Object Acknowledge (CAO) |
| S14F11 | Delete Object Request |
| S14F12 | Delete Object Acknowledge (DOA) |
| S16F5 | Process Job Command Request (PRJCMDR) |
| S16F6 | Process Job Command Acknowledge (PRJCMDA) |
| S16F11 | PRJobCreateEnh |
| S16F12 | PRJobCreateEnh Acknowledge |
| S16F15 | PRJobMultiCreate |
| S16F16 | PRJobMultiCreate Acknowledge |
| S16F17 | PRJobDequeue |
| S16F18 | PRJobDequeue Acknowledge |
| S16F19 | PRGetAllJobs |
| S16F20 | PRGetAllJobs Send |
| S16F21 | PRGetSpace |
| S16F22 | PRGetSpace Send |
| S16F27 | Control Job Command Request |
| S16F28 | Control Job Command Acknowledge |